Piezocatalysis for Chemical–Mechanical Polishing of SiC: Dual Roles of t‐BaTiO<sub>3</sub> as a Piezocatalyst and an Abrasive
Tao Hu, Jinxi Feng, Wen Yan, Shuanghong Tian, Jingxiang Sun, Xiaosheng Liu, Di Wei, Ziming Wang, Yang Yu, Jason Chun‐Ho Lam, Shaorong Liu, Zhong Lin Wang, Ya Xiong (2023). Piezocatalysis for Chemical–Mechanical Polishing of SiC: Dual Roles of t‐BaTiO<sub>3</sub> as a Piezocatalyst and an Abrasive. , 20(21), DOI: https://doi.org/10.1002/smll.202310117.
