An Experimental/Computational Approach to Identify Moduli and Residual Stress in MEMS Radio-Frequency Switches
Horacio D. Espinosa, Yunhui Zhu, M. Fischer, John W. Hutchinson (2003). An Experimental/Computational Approach to Identify Moduli and Residual Stress in MEMS Radio-Frequency Switches. Experimental Mechanics, 43(3), pp. 309-316, DOI: 10.1177/00144851030433010.
