Distributed Hammerstein Modeling for Cross-Coupling Effect of Multiaxis Piezoelectric Micropositioning Stages
Hai‐Tao Zhang, Bo Hu, Linlin Li, Zhiyong Chen, Dongrui Wu, Bowen Xu, Xiang Huang, Guoying Gu, Ye Yuan (2018). Distributed Hammerstein Modeling for Cross-Coupling Effect of Multiaxis Piezoelectric Micropositioning Stages. IEEE/ASME Transactions on Mechatronics, 23(6), pp. 2794-2804, DOI: 10.1109/tmech.2018.2870864.