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  5. Synthesis and Fabrication of High‐Performance n‐Type Silicon Nanowire Transistors

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Article
English
2004

Synthesis and Fabrication of High‐Performance n‐Type Silicon Nanowire Transistors

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English
2004
Advanced Materials
Vol 16 (21)
DOI: 10.1002/adma.200400472

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Charles M. Lieber
Charles M. Lieber

Harvard University

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Gengfeng Zheng
Wei Lü
Song Jin
+1 more

Abstract

Single crystal n-type silicon nanowires (SiNWs) with controlled phosphorus dopant concentrations have been successfully synthesized for the first time (see Figure). Field-effect transistor (FET) devices fabricated from these n-SiNWs exhibit good device properties, with mobilities more than 100 times greater than previous reports, and comparable to high-performance planar silicon FETs.

How to cite this publication

Gengfeng Zheng, Wei Lü, Song Jin, Charles M. Lieber (2004). Synthesis and Fabrication of High‐Performance n‐Type Silicon Nanowire Transistors. Advanced Materials, 16(21), pp. 1890-1893, DOI: 10.1002/adma.200400472.

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Publication Details

Type

Article

Year

2004

Authors

4

Datasets

0

Total Files

0

Language

English

Journal

Advanced Materials

DOI

10.1002/adma.200400472

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