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  5. Research on variable arc beam processing of ITO conductive glass based on spatial light modulation

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Article
en
2025

Research on variable arc beam processing of ITO conductive glass based on spatial light modulation

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en
2025
DOI: 10.1117/12.3072853

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Guanrong Chen
Guanrong Chen

City University Of Hong Kong

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Yong Zhu
Shufeng Sun
Bing Xia
+5 more

Abstract

This study presents a novel variable arc-shaped beam processing technique based on Spatial Light Modulators (SLM) for high-precision ITO (Indium Tin Oxide) conductive glass surface stripping. Traditional laser processing techniques face limitations in precision and efficiency. However, by superimposing offset holograms, arc-shaped beams of varying shapes and sizes can be generated, thus enhancing the quality and flexibility of ITO glass surface stripping. In the experiments, key parameters such as laser power and scanning speed were optimized. The results demonstrate that the use of variable arc-shaped beams significantly improves processing precision, reduces the heat-affected zone, and effectively increases processing efficiency. Microscopic observation and analysis further validate the feasibility and superiority of this method. This research provides a new approach for laser surface stripping and holds significant application value in enhancing the quality and efficiency of ITO conductive glass surface stripping.

How to cite this publication

Yong Zhu, Shufeng Sun, Bing Xia, Junbao Li, Li Liang, Xuri Li, Guanrong Chen, Pingping Wang (2025). Research on variable arc beam processing of ITO conductive glass based on spatial light modulation. , DOI: https://doi.org/10.1117/12.3072853.

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Publication Details

Type

Article

Year

2025

Authors

8

Datasets

0

Total Files

0

Language

en

DOI

https://doi.org/10.1117/12.3072853

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