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  5. Formation of Patterned Microstructures of Conducting Polymers by Soft Lithography, and Applications in Microelectronic Device Fabrication

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Article
en
1999

Formation of Patterned Microstructures of Conducting Polymers by Soft Lithography, and Applications in Microelectronic Device Fabrication

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0 Files

en
1999
Vol 11 (12)
Vol. 11
DOI: 10.1002/(sici)1521-4095(199908)11:12<1038::aid-adma1038>3.0.co;2-l

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Younan Xia
Younan Xia

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Weng Sing Beh
In Tae Kim
Dong Qin
+2 more

Abstract

Micromolding in capillaries (MIMIC)has been used to form patterned relief structures with lateral dimensions as small as ∼350 nm. The microstructure in the figure consists of polyaniline (on an insulating Si/SiO2 base) that has been converted into the emeraldine salt to yield a conductive microstructure that could subsequently be used as a patterned electrode in fabricating all-plastic field effect transistors.

How to cite this publication

Weng Sing Beh, In Tae Kim, Dong Qin, Younan Xia, George M. Whitesides (1999). Formation of Patterned Microstructures of Conducting Polymers by Soft Lithography, and Applications in Microelectronic Device Fabrication. , 11(12), DOI: https://doi.org/10.1002/(sici)1521-4095(199908)11:12<1038::aid-adma1038>3.0.co;2-l.

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Publication Details

Type

Article

Year

1999

Authors

5

Datasets

0

Total Files

0

Language

en

DOI

https://doi.org/10.1002/(sici)1521-4095(199908)11:12<1038::aid-adma1038>3.0.co;2-l

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