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Daan Hein Alsem, R. van der Hulst, Eric A. Stach, Michael T. Dugger, J. Th. M. De Hosson, Robert O. Ritchie (2010). Wear mechanisms and friction parameters for sliding wear of micron-scale polysilicon sidewalls. Sensors and Actuators A Physical, 163(1), pp. 373-382, DOI: 10.1016/j.sna.2010.06.025.
