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Véronique Cremers, Geert Rampelberg, Kitty Baert, Shoshan T. Abrahami, Nathalie Claes, Thaís Milagres de Oliveira, Herman Terryn, Sara Bals, Jolien Dendooven, Christophe Detavernier (2019). Corrosion protection of Cu by atomic layer deposition. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, 37(6), DOI: 10.1116/1.5116136.