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Daan Hein Alsem, Robert Timmerman, Eric A. Stach, Christopher L. Muhlstein, Michael T. Dugger, Robert O. Ritchie (2008). Wear and Fatigue in Silicon Structural Films for MEMS ApplicationsWear and Fatigue in Silicon Structural Films for MEMS Applications. Springer eBooks, pp. 671-672, DOI: 10.1007/1-4020-4972-2_332,
