T. Höchbauer

Investigation of plasma hydrogenation and trapping mechanism for layer transfer

Peng Chen, Paul Kim Ho Chu, T. Höchbauer, J. K. Lee, M. Nastasi, Dan Buca, S. Mantl, Roger Loo, Matty Caymax, T. L. Alford, J. W. Mayer, N. David Theodore, Ming Cai, Bernd Schmidt, S. S. Lau (2005). Investigation of plasma hydrogenation and trapping mechanism for layer transfer. , 86(3), DOI: https://doi.org/10.1063/1.1852087.